| ORGANISING COMMITTEE |
| Antonio Correia (Phantoms Foundation, Spain) |
| Christopher J. Wilson (Imec, Belgium) |
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| LOCAL COMMITTEE |
| Andrew Cockburn (Applied Materials, Belgium) |
| Lin Hou (Western Digital, Belgium) |
| Gosia Jurczak (Lam, Belgium) |
| Jan Maes (ASM, Belgium) |
| Gayle Murdoch (imec, Belgium) |
| Nicola Nastasi (Micron, Belgium) |
| Martin O'Toole (ASML, Belgium) |
| Paulina Rincon Delgadillo (TSMC, Belgium) |
| Ainhoa Romo Negreira (TEL, Belgium) |
| Veronica Strong (Intel, Belgium) |
| Christian Witt (Globalfoundries, Belgium) |
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| SCIENTIFIC COMMITTEE |
| Thierry Chevolleau (CEA-Leti, France) |
| Reinhold Dauskardt (Stanford University, USA) |
| Christophe Detavernier (University of Gent, Belgium) |
| Magali Gregoire (STMicroelectronics, Italy) |
| Michael Hecker (GlobalFoundries, USA) |
| Christian Lavoie (IBM, USA) |
| Dominique Mangelinck (IM2NP, France) |
| Fabrice Nemouchi (CEA-Leti, France) |
| Takayuki Ohba (Tokyo Institute of Technology, Japan) |
| Samuele Sciarrillo (STMicroelectronics, Italy) |
| Stefan E. Schulz (TU-Chemnitz, Germany) |
| Cristina Torregiani (Infineon, Germany) |
| Loris Vendrame (Micron, Italy) |
| Fabien Volpi (INP-SIMAP, France) |
| Claudia Wiemer (IMM-CNR, Italy) |
| Christopher J. Wilson (Imec, Belgium) |
| Zhen Zhang (Uppsala University, Sweden) |
| Ehrenfried Zschech (Brandenburg University of Technology Cottbus – Senftenberg, Germany) |
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| TECHNICAL COMMITTEE |
| Concepción Narros Hernández (Phantoms Foundation, Spain) |
| Joaquin Gaspar Ramon-Laca Maderal (Phantoms Foundation, Spain) |
| Jose Luis Roldan (Phantoms Foundation, Spain) |
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